| 摘要 |
<p>PURPOSE:To recover inert gas having high purity contg. almost no hydrocarbon by adding O2 to inert gas contg. carbonaceous combustible matters in high concn. by converting it to CO2, and removing by converting residual O2 to H2O by adding H2 thereafter. CONSTITUTION:Inert gas (e.g. gaseous Ar) contg. carbonaceous combustible matters as feed gas is pressurized 32 and cooled 33, and conducted to a heavy hydrocarbon unit 4 where oil mist, etc. is removed. Then, the feed gas is introduced into an adsorption tower 42 to remove heavy hydrocarbons by adsorption and transferred thereafter to a first reaction unit 5, in which the combustible component remaining in the feed gas is burnt by adding O2 to form CO2 and H2O. The feed gas at high temp. discharged from a reaction tower 53 is cooled 54, and condensed water is separated 55 and removed. The feed gas contg. CO2 is transferred to a second reaction unit 6 where CO2 is removed by adsorbing to an adsorbent packed in the adsorption tower. Further, remaining impurities are removed, thus, inert gas (i.e. Ar) having high purity is recovered.</p> |
