| 摘要 |
PURPOSE:To prevent a molecular beam from dispersing by providing a transmitting means of heated molecular beam between an emission opening of molecular beam and a coat forming surface of a sample. CONSTITUTION:A sample 40 is installed on a sample installing surface of a sample holder 30 in a growth chamber 10. The sample 40 is heated up to a necessary temperature to form an epitaxial film on its coat forming surface. A cylinder 51 is heated by a heater 52. After a molecular beam irradiated from an emission opening 21 of molecular beam of a molecular beam source 20 passes through an inside of the cylinder 51, it reaches the coat forming surface of the sample 40. Any molecular beam dispersing in a direction except the coat forming surface of the sample 40 passes through the inside of the cylinder 51 without being absorbed in a wall surface of the cylinder 51. |
