发明名称 Light collector for optical contaminant and flaw detector
摘要 A two-stage light collector, including a first stage which admits a scanning beam and a second stage which is optically connected to the first stage and has a light detector therein. The first stage has a shape which re-images diffusely scattered radiation from a target on which the radiation impinges. The first stage directs light toward an entrance aperture in the second stage which indirectly reflects light toward the detector associated with the second stage.
申请公布号 US4601576(A) 申请公布日期 1986.07.22
申请号 US19830559909 申请日期 1983.12.09
申请人 TENCOR INSTRUMENTS 发明人 GALBRAITH, LEE K.
分类号 G01N21/88;G01J1/02;G01N21/84;G01N21/894;G01N21/94;G01N21/95;G01N21/956;(IPC1-7):G01N21/00 主分类号 G01N21/88
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