| 摘要 |
PURPOSE:To eliminate defects such as breakdown and the like of an electrode layer at a step part, by forming a first electrode on the entire surface after the patterning of a light conducting layer, removing a resist pattern, then forming an electrode layer, and forming an electrode. CONSTITUTION:A light conducting layer 12 is uniformly formed on a substrate 11. The conducting layer 12 is patterned by using a resist pattern 13. With the pattern 13 being made to remain, a first electrode layer 18 is formed on the entire surface. The pattern 13 is removed. An electrode layer 14 is formed on the entire surfaces of the conducting layer 12 and the electrode layer 18. A resist pattern 15 is formed thereon. The electrode layer 14 on the conducting layer 12 is etched into a desired shape. A pair of electrodes 14a is formed. The pattern 15 is removed. A passivation film 16 is finally formed on the entire surface as a protecting film. Thus defects such as breakdown and the like of the electrode layer 14 at a step part can be eliminated. |
