发明名称 |
Method of fabricating air supported crossovers |
摘要 |
A method is disclosed for the fabrication of an air supported crossover bridge which consists of a polyimide coating being set over the metalized device. Then, supports are defined for the crossover and the crossover is added. Once the crossover has been added the excess is removed and the polyimide layer is removed leaving the air supported bridge.
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申请公布号 |
US4601915(A) |
申请公布日期 |
1986.07.22 |
申请号 |
US19840653414 |
申请日期 |
1984.09.24 |
申请人 |
MOTOROLA, INC. |
发明人 |
ALLEN, DONALD E.;GROSS, RICHARD A.;KNUTH, HOWARD D. |
分类号 |
H01L21/768;H03H9/145;(IPC1-7):H01L21/88 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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