发明名称 CRYOSTAT
摘要 PURPOSE:To remove clogging in a helium introducing pipe due to air freezing with helium being stored, by providing a heater in the helium introducing pipe to a sample chamber, in a cryostat having a structure, wherein the sample can be replaced with the liquid helium being stored, and the liquid helium can be introduced from a storing chamber to the sample chamber. CONSTITUTION:In a cryostat 50, a sample chamber 1 is independently provided from a liquid helium storing chamber 2 and a vacuum heat insulating chamber 5. The sample can be replaced with liquid helium 3 being stored. The liquid helium, which cools the sample chamber 1, is introduced to the sample chamber 1 through a flow-rate regulating valve 7 and a liquid helium introducing pipe 8. In the introducing pipe 8, a helium introducing pipe heater 12 is provided. Even when air and moisture are mixed in the sample chamber 1 and frozen in the introducing pipe 8 when the sample is replaced and the introducing pipe is clogged, the frozen air and moisture are melted and removed by heating the heater 12 with the liquid helium 3 being stored.
申请公布号 JPS61161778(A) 申请公布日期 1986.07.22
申请号 JP19850002763 申请日期 1985.01.11
申请人 NEC CORP 发明人 TERAO HIROSHI
分类号 G01R31/26;H01L39/04 主分类号 G01R31/26
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