| 摘要 |
PURPOSE:To form an extremely hard, uniform polymer film on a base, by mounting a base on a cathode serving as a counter electrode for high-frequency discharge and forming a polymer film on the base by impinging cations against it. CONSTITUTION:A base 6 (e.g., polycarbonate base) is mounted on a cathode 5, and the reaction chamber 1 is evacuated by a vacuum generator through a vent 4 until the pressure in the chamber 1 is decreased to about 10<-3> Pa. A monomer gas (e.g., hexamethyldisiloxane) form an inlet 2 and a carrier gas (e.g., oxygen) from an inlet 3 are fed to the chamber 1, and the internal pressure of the chamber 1 is kept at about 20 Pa by controlling the quantity of gas discharged. When a high-frequency discharge is generated between electrodes 5 and 7 under these conditions, a uniform hard polymer film is formed on the surface of the base 6. In the above film formation process, the polymerization reaction is advanced while cations are impinged against the base 6, by a carrier gas.
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