发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To reduce the moment of inertia by fixing and mounting a coil body for a linear motor and fitting a magnet body to a tool arm. CONSTITUTION:When a capillary 16 reaches the upper surface of a pellet 47, the change of a positional signal is detected by an algorithm 50, a changeover circuit 51 is changed over, an algorithm 49 and a comparison circuit 43 are connected while the algorithm 49 is started, and a pressing signal is outputted to the comparison circuit 43 according to a pressing profile. The signal passes through the comparison circuit 43 and a driving circuit 44, currents corresponding to the pressing profile are flowed through a linear motor 29, and pressing force is applied to a wire 16a and the pellet 47. The changeover circuit 51 is operated by the algorithm 50 again and an algorithm 46 is connected to the comparison circuit 43, a speed signal according to the profile of the section (d) of a curve S is emitted from the algorithm 46 again, the tip of the capillary 16 is displaced, and brought into contact with a lead 48 through the wire 16a, and pressed for a fixed time, thus joining the wire. Consequently, a small-sized light-weight bonding head proper to speeding-up can be obtained.
申请公布号 JPS61159744(A) 申请公布日期 1986.07.19
申请号 JP19850000188 申请日期 1985.01.07
申请人 TOSHIBA CORP 发明人 KASHIMA NORIYASU;ATSUMI KOICHIRO
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址