| 摘要 |
PURPOSE:To obtain a titled vibrator having a high reliability against the environmental variation of a thermal shock from the outside by forming an irregularity on the surface of a copper foil provided on an insulating substrate, connecting and fixing the copper foil and a terminal part by soldering, and connecting and fixing a piezoelectric ceramic diaphragm to the copper foil by using a conductive adhesive agent or solder. CONSTITUTION:Copper foils 13, 14 are provided on an insulating substrate 12, irregularities 15, 16 are formed mechanically or chemically on the surface of said copper foils 13, 14, and an oxidation inhibiting film which is melted by a solvent such as a pre-flux, etc. is formed on the surface of the copper foils 13, 14. Subsequently, the copper foils 13, 14 and a terminal part are connected and fixed by soldering, washed by a solvent such as alcohol, etc., and thereafter, a piezoelectric ceramic diaphragm 19 is connected and fixed to the copper foils 13, 14 by using conductive adhesive agents 17, 18 or solder. In such a way, the connecting and fixing strength is improved remarkably.
|
