发明名称 MASS FLOW RATE CONTROLLER
摘要 <p>PURPOSE:To prevent the movement of heat between thermal sensors and to prevent an error in attitude by covering a sensor tube with a heat conductive member which has a projection piece formed atop of the sensor tube. CONSTITUTION:A room 96 communicates with an adjacent room 95 through the slight gap 96 formed of the tip 94 of the projection piece 95 and the sensor tube 5. Therefore, the surface area of the internal wall of the heat conductive member 91 is large and even if the distance from the base part 97 of the member 91 to the external wall of the sensor tube 5 is long, the heat energy in the room 95 is absorbed excellently. Further, the tip 94 of the projection piece 92 never contacts the sensor tube 5 and heat is absorbed from neither a resistance heat generating body 6A nor 6B, so that there is no decrease in measurement sensitivity. Furthermore, the projection piece 92 allows the rooms 95 to communication with each other through only the gap 96 and the rooms 95 are basically isolated from each other, so a precise flow detection is detected. Then, the occurrence of an error in attitude is prevented.</p>
申请公布号 JPS61159110(A) 申请公布日期 1986.07.18
申请号 JP19840279116 申请日期 1984.12.29
申请人 NIPPON TAIRAN KK 发明人 SUDO TAKASHI;SUZUKI ISAO;HAMAGURI TAKESHI
分类号 G05D7/06;G01F1/68;G01F1/684;G01F1/69;G05D7/00 主分类号 G05D7/06
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