| 摘要 |
<p>PURPOSE:To provide a head capable of recording with high quality even in the case of high-speed printing and showing satisfactory durability, by a construction wherein a protective layer comprising silicon oxynitride (SiOXNY) as a main constituent and a protective layer comprising silicon nitride as a main constituent are provided on a heating element part. CONSTITUTION:At the heating element part 2 of the head, a tantalum nitride heating element layer 8 is covered by the first protective layer 17 of SiOXNY together with wires 9, 10, and the second protective layer 18 of silicon nitride Si3N4 is provided thereon for protection. Accordingly, a head with excellent durability can be provided in which thermal stresses generated by repeated rise and fall in the temperature of the heating element part are absorbed by the first protective layer having excellent thermal shock resistance, and abrasion due to friction with an ink film is suppressed by the second protective layer having excellent abrasion resistance.</p> |
