| 摘要 |
PURPOSE:To improve thermal conduction thus to cool an emitter chip sufficiently by employing an inclined recess for the joint face between a saphire, metal cooling section and emitter supporting table to thermally compress the saphire. CONSTITUTION:An electric field ionization gas ion source is formed by electrically insulating an emitter chip 14 supporting table 15 and a copper cooling section 11 through a saphire 12 then connecting. Here, inclined convex/concave structure is employed for the joint face between the cooling section 11, emitter supporting table 15 and the saphire 12. Then the cooling section 11, the saphire 12 and the emitter supporting table 15 are fitted and tightened through a metal 16 and screws 17, 18. Upon cooling of the jointing face, the saphire 12 is compressed through shrinkage of metal to improve the tightness while to reduce the thermal resistance and to cool the emitter chip 14 sufficiently.
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