| 发明名称 |
SEXTUPOLE SYSTEM FOR THE CORRECTION OF SPHERICAL ABERRATION |
| 摘要 |
A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses. |
| 申请公布号 |
DE3071640(D1) |
申请公布日期 |
1986.07.17 |
| 申请号 |
DE19803071640 |
申请日期 |
1980.09.19 |
| 申请人 |
UNITED STATES DEPARTMENT OF ENERGY |
发明人 |
CREWE, ALBERT VICTOR;KOPF, DAVID AARON |
| 分类号 |
H01J3/12;H01J37/153;(IPC1-7):H01J3/12 |
主分类号 |
H01J3/12 |
| 代理机构 |
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