| 摘要 |
PURPOSE:To manufacture Ti product having commodity price and exhibiting various interference colors simply at low temp. and by dry process, by arranging Ti member to be treated in a treating chamber, exhausting the chamber to vacuum, and irradiating plasma generated by microwave to Ti member. CONSTITUTION:At first, a quartz tube 7 and inner part of the treating chamber 4 are exhausted to high vacuum by a exhausting system 5. Next, a treating Ti base plate 9 is heated and held at a prescribed temp. by a heater 11, and plasma generating gas (air, water, etc.) is introduced into the tube 7 from a gas introducing pipe 8. Microwave is irradiated to the gas from a microwave oscillator 1, to generate plasma in the tube 7. The plasma is transferred to the chamber 4 by a rotary pump 13, and surface of the plate 9 arranged in the chamber 4 is oxidation colored. The surface oxidation film exhibits various interference colors such as light gold, gold, blue, light blue, and Ti member having high commodity price is obtd. |
