| 摘要 |
PURPOSE:To prevent the lowering in the purity of purified hydrogen gas, by applying titanium nitride to the hydrogen gas contact part of the main body of a palladium alloy tubular membrane apparatus. CONSTITUTION:One open end 2b of a Pd-Ag tubular membrane 2 is sealed with a nickel seal member 5 and the other end thereof is welded to a stainless steel main body 1 through a nickel tubular member 3. Hydrogen gas to be purified is blown into the main body 1 from an introducing pipe 10 to be purified by the tubular membrane 2 while the purified gas is taken out from a purified hydrogen take-out pipe 13. At this time, coating layers 18, 19 comprising a stable conductive material withstanding high temp. and discharging a reduced amount of gas are applied to the part contacted with hydrogen gas of the inner wall of the main body 1 and the inner wall part of a secondary side space 14. As said conductive material, titanium nitride, CrN, AlN or BN are used.
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