APPARATUS FOR PURIFYING HIGH PURITY HYDROGEN

摘要

PURPOSE:To prevent the damage of a purification membrane by fine particles, by connecting a gas exhaust system of concn. impure component gas equipped with a filter preventing the invasion of fine particles to a palladium alloy tubular membrane apparatus. CONSTITUTION:One open end 2b of a Pd-Ag tubular membrane is sealed and the other open end 2a thereof is attached to a stainless steel main body through a tubular member 3. Hydrogen gas to be purified is blown in from an introducing pipe 10 and passed through the tubular membrane 2 to be purified while the purified hydrogen gas is taken out from a purified hydrogen take-out pipe 13. An exhaust system 20 for exhausting hydrogen gas containing an impure component in a conc. state is equipped with the valves 20c, 20b and a filter 20c. The filter 20c comprises one with a pore size of 0.02mum and inhibits fine particles invaded from the atmosphere to adhere to the tubular membrane 2.