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发明名称
MICROELECTRONIC MATERIALS' THIN LAYERS SINGLE-PLATE PLASMA-CHEMICAL ETCHING DEVICE
摘要
申请公布号
CS244071(B1)
申请公布日期
1986.07.17
申请号
CS19850001419
申请日期
1985.02.28
申请人
SKRIVAN,BORIS,CS;HAJEK,LEOS,CS;VESELY,VACLAV,CS;KUCIREK,JIRI,CS
发明人
SKRIVAN,BORIS,CS;HAJEK,LEOS,CS;VESELY,VACLAV,CS;KUCIREK,JIRI,CS
分类号
H01L21/46;(IPC1-7):H01L21/46
主分类号
H01L21/46
代理机构
代理人
主权项
地址
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