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发明名称
摘要
申请公布号
DE2903077(C2)
申请公布日期
1986.07.17
申请号
DE19792903077
申请日期
1979.01.26
申请人
SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN, DE
发明人
FEUERBAUM, HANS-PETER, DIPL.-PHYS., 8000 MUENCHEN, DE
分类号
H01J37/28;G01R31/26;G01R31/302;G01R31/305;H01J37/26;H01J49/48;H01L21/66;(IPC1-7):G01R31/28;G01R19/00
主分类号
H01J37/28
代理机构
代理人
主权项
地址
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