摘要 |
PURPOSE:To obtain the titled array which can be accurately evaluated in electrostatic characteristics without breaking photoelectric conversion elements, by a method wherein probes are brought into contact with the open-end leads of sub photoelectric conversion elements. CONSTITUTION:Of discrete electrodes 12 linearly mounted on a glass substrate 11, three at each of both ends are provided with open-end leads 16, and photoelectric conversion elements whose constituents are these six discrete electrodes in total are made as sub photoelectric conversion elements. The discrete electrodes 12 at the center are provided with signal leads 17, and these many photoelectric conversion elements are made as main photoelectric conversion elements. Further, ground wirings 18 are connected to the discrete electrodes located between the discrete electrodes of these main photoelectric conversion elements and those of the sub photoelectric conversion elements, and the discrete electrodes to which the ground wirings 18 are connected are made as ground electrodes. |