发明名称 JETTING DEVICE OF VAPOR OF MELTED SUBSTANCE
摘要 PURPOSE:To prevent the deformation of a vapor jetting orifice of a crucible, by disposing a shielding material opposite to the jetting orifice and above a portion for holding a melted substance. CONSTITUTION:A shielding material 4 disposed opposite to a jetting orifice 3a is placed on the stepped parts 1b of the inner wall of a crucible which are located above a portion 1a for holding a melted substance. This shielding material 4 is formed of a rectangular board-shaped substance and has gaps 5 from two surfaces of the inner wall of the crucible 1. Even when the substance melted in the holding portion 1a of the crucible 1 protrudes upward, the melted substance is obstructed by the shielding material 4, and thereby the jetting orifice is prevented from being deformed by the melted material sticking thereto.
申请公布号 JPS61156809(A) 申请公布日期 1986.07.16
申请号 JP19840275421 申请日期 1984.12.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 MORI EISAKU;YAMANISHI KENICHIRO
分类号 C23C14/24;H01L21/203 主分类号 C23C14/24
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