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发明名称
PLANARIZATION OF MULTI-LEVEL INTERCONNECTED METALLIZATION SYSTEM
摘要
申请公布号
EP0146038(A3)
申请公布日期
1986.07.16
申请号
EP19840114433
申请日期
1984.11.30
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BARTUSH, THOMAS ADAM;BROOKS, GARTH ALVIN;KITCHER, JAMES ROBERT
分类号
H01L21/3205;H01L21/3105;H01L21/311;H01L21/3213;H01L21/768;(IPC1-7):H01L21/90;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
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