| 摘要 |
PURPOSE:To improve working efficiency, according to a method wherein in a substrate containing apparatus for intra-process transfer, an arrangement is such that the substrates are supported and conveyed by a pair of endless rotative support members which are intermittently driven in a vertical direction. CONSTITUTION:A substrate 1b before processing is manually charged from a substrate receptacle 10 to a delivery/receiving unit of a non-illustrated processing unit. The substrate 1b which has been processed is delivered again to the substrate receptacle 10 and the substrate receptacle 10 is lowered by one step by driving a rotary machine 11, and a next substrate 1b before processing waits for the arrival of the delivery/receiving unit. At this time, since substrates 1a, 1b are not contained in the uppermost substrate receptacle 10, a next substrate 1b before processing is manually charged thereto. In such arrangement, working efficiency is improved by simultaneously executing receiving of a substrate before processing, removal of a substrate after processing, and delivery of a substrate to a processing unit at specific locations. |
