| 摘要 |
PURPOSE:To reduce the time for a preparatory operation by providing a means for generating position information to a beam positioner, obtaining the difference information by comparison of the position information with a target position information and processing the work in accordance with the obtd. difference information and the instruction information from the outside. CONSTITUTION:The beam positioner 2 has mirrors 21, 22 for biaxial scanning and the laser beam from a laser device 1 for processing permits two-dimensional scanning. The laser beam through the positioner 2 is made incident on a dichroic mirror 4 via a condenser lens 3. The laser beam is changed in the optical axis by the mirror 4 and is projected to the work 5. A data processing unit 8 and a control part 7 operates relationally the target position information and the actual position information and controls the positioner 2 by reading the trimming start point of the work 5 together with the necessary external information. The time for the preparatory operation in the stage of exchanging the work 5 is thus reduced. |
