| 摘要 |
PURPOSE:To reduce the influence of an external magnetic field and to improve reliability by providing a semiconductor two-dimensional detector which detects the incidence position of output light in two dimensions by utilizing variation in the resistance value of a feed path with the incidence position of said output light. CONSTITUTION:PSD6 is the semiconductor two-dimensional detector which has triple structure of a P layer 6a, an I layer 6b, and an N layer 6c and also has output terminals 6d1 and 6d2 at both end parts of the P layer 6a and a bias terminal 6e at the N layer 6c, and this detector measures the incidence position of light incident on the P layer 6a by utilizing variation in resistance value proportional to the distance from the light incidence position to output terminals 6d1 and 6d2. Then, fluorescent light incident on an MCP4 is amplified and outputted as light, which is incident on the PSD6 through a fiber plate 5. In this case, an MCP4a constituting a photoelectric image multiplying part 4 has a small electron track, so it is hardly affected by an external magnetic field and reliable data is obtained.
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