| 摘要 |
PURPOSE:To suppress an arc discharge, and to maintain stably a glow discharge by providing the first stage smoothing circuit for reducing a ripple, the second stage smoothing circuit for preventing a large current, and an absorbing circuit for absorbing an arc current, on a current path going toward an electrode from a rectifier. CONSTITUTION:A power source unit 5 is constituted of a thyristor stack 1 connected to a three-phase AC power source, a double three-phase bridge rectifier 2 for rectifying its output, a smoothing circuit group 3, and a CR absorbing circuit 14, and its DC voltage is applied between an anode 6 and a target (cathode) 7 of a spattering device 5. In such a case, the smoothing circuit group 3 is constituted of the first stage smoothing circuit 10 of an inverted l type consisting of an inductor L1 and a capacitor C1, and the second stage smoothing circuit 11 of a T type consisting of inductors L2, L3 and a capacitor C2. In such a state, the second stage smoothing circuit 11 functions as a high frequency filter, too, in case when an arc spot has been generated in the target 7, also, an arc current is absorbed by the CR absorbing circuit 4, and a normal discharge can be maintained. |
