| 摘要 |
PURPOSE:To prevent a temperature rise of delivery gas and improve efficiency of a pump, by arranging a heat exchange means, which cools the delivery gas, in a delivery port part of the screw vacuum pump. CONSTITUTION:A screw vacuum pump, forming in a delivery passage 14 communicating with a pump delivery port a heat transfer pipe 20 adjacent to the delivery port, supplies a delivery gas cooling medium in said heat transfer pipe. Consequently, the pump, decreasing a temperature of its casing and a temperature of delivery gas, enables efficiency of the pump to be improved. Instead of arranging the heat transfer pipe, a plurality of cooling fins 21 may be formed in the delivery passage releasing heat generated in the delivery gas to water cooling jackets 15, 15a formed in the periphery of the fins.
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