| 摘要 |
PURPOSE:To obtain a flow-through cell type analyser capable of measuring concn. from a small amount of a specimen, by providing the gate responsive region of an ion sensor in the elongated recessed groove formed to a flat substrate. CONSTITUTION:The title flow-through cell type ion sensor 1 constituted of ISFET12, wherein an elongated recessed groove 11 forming a specimen flow channel is provided to a flat silicon substrate 10, and lid 3 integrally attached to said groove 11. The gate responsive region of ISFET is formed to the recessed groove 11 and the source electrode 2 and drain electrode 3 of the ion sensor 1 are respectively connected to lead wires 4. The specimen enters the cell 1 from an inflow port 5 and passes on the gate responsive region to be flowed out of an outflow port 6. The length, width and thickness of the flow-through cell type ion sensor are respectively several ten-several mm and there is no joint part between cells and, therefore, measurement using an extremely small amount of a specimen is enabled. |
