| 摘要 |
PURPOSE:To observe the change in the crystallinity of a specimen quantitatively within a short time, by simultaneously performing the annealing of a specimen and the observation of an electron beam differaction image and applying space Fourier resolution to the differaction image. CONSTITUTION:Electron beam 1 is converged and shaped by a converging coil 3 and a stigma coil 4 to irradiate a specimen 6. The specimen 6 is annealed under heating by a resistance heating type heater 7 and the temp. thereof is measured by a thermocouple 8 and a radiation thermometer 9. The electron beam 10 reflected by the surface of the specimen draws a differaction pattern on a fluorescent plate 11 and the image of said pattern is picked up by an image pick-up apparatus 12 and the result of space Fourier resolution due to image processing is outputted onto display. The max. value of a Fourier compo nent with space frequency of 20cm<-1> or more is displayed on a digital display device and the magnitude of this value corresponds to the clearness of the Kikuchi line of the differaction image.
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