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发明名称
NITROGEN TRIFLUORIDE
摘要
申请公布号
GB8613285(D0)
申请公布日期
1986.07.09
申请号
GB19860013285
申请日期
1986.06.02
申请人
ADVANCED SEMICONDUCTOR MATERIALS INC
发明人
分类号
C11D7/02;C04B41/53;C23C16/44;C23F1/12;H01L21/302;H01L21/304;H01L21/306;H01L21/3065;(IPC1-7):C09K13/00
主分类号
C11D7/02
代理机构
代理人
主权项
地址
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