| 摘要 |
PURPOSE:To prevent the deformation due to thermal strain of the fixing positions of probes and to detect the electrical characteristics of the element with high accuracy by providing a means for removing the heat conducted to the probes from them. CONSTITUTION:An annular resin layer 11 is arranged in the center on one side of a probe board 10 and probes 12 are attached radially from the board 10 with said resin layer 11 penetrated through. The arrangement of the probes 12 is determined according to an arrangement of the regions to be measured. Signal transmission means are connected to the probes 12. In the resin sealed layer 11, a cooling pipe 13 is buried to which a supply pipe 14 and an exhaust pipe 15 for a cooling medium are connected. These pipes are led out to the outside from another side of the board 10 and are connected to a cooling medium supply and exhaust mechanism 16. By this constitution, it is possible to measure the electrical characteristics of the element while removing the heat conducted to the probes 12 at the measurement thereby preventing the deformation of the fixing positions of the probes 12 due to thermal strain and improving the accuracy in measurement exceedingly. |
