| 摘要 |
PURPOSE:To augment the reliability of a conveyor located between processes for wafer housing cassette by loading a track on a conveying truck where it can be lifted and lowered as required so as to convey it on the conveying path allowing the truck to be transferred to an intersection path. CONSTITUTION:A truck which allows a holder 10 to hold a cassette, is loaded on a conveying truck 7 allowing the truck to move on a conveying path 1 to a position that intersets an intersection path 2. The truck 8 which is loaded on the conveying truck 7 is engaged with a transverse guide 4. Then the transverse guide 4 is moved to a bay located at the end of the intersection path 2 by means of a wire 6 and a motor 5. Subsequently, a lift belt 11 which is winded on a reel 12 of a lift, is taken out allowing the holder 10 to be lowered, and then a cassette 9 is transferred to a conveyor arranged in the bay. This configuration enables the reliability of operation in the device to be augmented. |
