| 摘要 |
PURPOSE:A reaction gas containing hydrocarbon is introduced into the reactor in which a base plate is placed and electron rays are irradiated so that gas discharge may not take place to form the titled (carbon) film with characteristics similar to natural diamond. CONSTITUTION:A base plate 1 of glass or PE held with the holder 8 is placed in the reactor 2 and the reaction gas which is composed of at least one of hydrocarbons such as methane and hydrogen at a volume ratio of 1:(0.1-100) is introduced from the inlet 9 and the pressure is maintained at 10<-2>-10<-5>Torr in the reactor 2 and the base is heated by applying electricity to the heater 11. Then, the base plate 1 is irradiated on its surface with electron rays generated from the electron gun 3 in the chamber 5 under conditions of 100-1,000V accelerating voltage, 20-500mA/cm<2> current density so that gas discharge may not occur to form the objective diamond or diamond-like carbon film.
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