| 摘要 |
PURPOSE:To inspect an LSI efficiently, by mounting as an inspecting circuit a good general-purpose CPU chip with no defects, and by connecting the CPU circuit terminals with circuit terminals lying on a wafer. CONSTITUTION:A good CPU chip 2 is mounted on a non-active region 1 of a wafer with organic resin, etc. Around the region 1, Al electrodes 3 for signal lines, source lines and ground lines to be connected with circuit constitution units in the wafer are arrayed, and they are connected with Al electrodes 4 on the CPU chip 2 using gold or Al wires 5. For the purpose of operating the CPU chip, power is supplied therein and clock and start signals are fed from pads 8, 9 respectively. Execution command for inspection is stored in ROM, etc., in the CPU and the CPU starts execution of the inspection command by receiving a start signal. Inspection results are temporarily stored in RAM in the CPU and are output in the form of serial data when all inspections are finished. Thus as inspecting circuit of LSI no requiring redundancy can be provided simply at low cost. |
