| 摘要 |
PURPOSE:To increase the strength of mechanical coupling of wiring between a contact pressure sensing cell and a unit substrate by forming a cut groove in both edge parts of the unit substrate, and fitting a contact force sensing cell therein in the same level with a flank of the unit substrate. CONSTITUTION:Contact force sensing cells 3 are arranged in two arrays under a pressure receiving plate 5 and the unit substrate 12 is arranged further below them to constitute a contact force sensor which detects pressure applied to the pressure receiving plate 5 in three dimensions. A cut groove 11 is formed in both lengthwise edge parts of the substrate unit 12 and a contact force sensing cell 3 is fitted therein. In this case, the flank of the unit substrate 12 is set on the same plane with external flanks of contact force sensing cells 3 and necessary electric connections are made between metallic pads 8 and 13 provided on the respective flanks. When plural sensor units 30 are arranged, insulating spacer are interposed. |
