Surface acoustic wave accelerometer

摘要

An accelerometer comprises a quartz beam 1 having on its upper and lower faces surface acoustic wave devices 2, 3 and 2', 3'. The beam is centrally mounted on quartz spacers 4, 5 which have metallized contacts for the lower SAW device. The spacers are carried on a quartz substrate 6 which is supported on a header 7 forming the base of a dual-in-line package. Mass-loading 8 is provided on each end of the beam 1.