| 摘要 |
PURPOSE:To automatically observe the presence of bubbles generated from an object to be inspected, by placing a box body having a transparent bottom above the object being inspected immersed in a fluid to provide an optical detection mechanism therein to recognize bubbles from the object being inspected. CONSTITUTION:First, an inspection liquid 3 in an inspection tank 1 is heated with a heater 2 up to a specified temperature and then, a semiconductor device 5 placed on a base 4 is immersed into the inspection liquid 3 to a specified depth together with the base. Then, a camera cell 6 is lowered above the semi conductor device 5 to make a camera 8 focus on the undersurface of the trans parent bottom of the camera cell 6. Then, a TV camera 8 detects an image of a gas sealed into a semiconductor element (not illustrated) which leaks out side the semiconductor device 5, rising as bubbles 7 in the inspection liquid 3 as the semiconductor device is heated by the inspection liquid 3. Then, the results are provided to a display unit 12 as image signal via a binary coding section 10 and a judging section 11 to show the presence of bubbles 7. |
