| 摘要 |
PURPOSE:To simplify work process by forming pier holes in a photoresist arranged on a substrate, when forming a hot negative electrode in a fluorescent display device, and at the same time forming both base metal of negative electrode and a pole brace for supporting it. CONSTITUTION:A feeding wiring 6 and insulation layer 7 are arranged on a substrate 5, with a dry resist film 16 being formed on them. Next, pier holes 11 are formed by photo-lithography method on the position corresponding to the wiring 6, and then a tungsten thin film 13 is coated on them by sputtering method, followed by a resist film 14 thereon. Thereafter, the assigned shape of a negative electrode is obtained by photo-lithography method, and then a hot negative electrode 15 of a fluorescent display device is formed by removing a dry resist film 16 in use of organic solvent. Therefore, since the pier holes 11 are filled with tungsten to form a pole brace 8 at the same time when the tungsten thin film 13 is formed, simplification of work process can be realized. |
