| 摘要 |
<p>PURPOSE:To enhance the recovery rate of an objective component, by adsorbing a highly adsorbable component by a first stage PSA apparatus and adsorbing the medium adsorbable component in gas after passing by a second stage PSA apparatus while using a low adsorbable component as the washing gas of the first PSA apparatus. CONSTITUTION:Stock gas is introduced into the adsorbing tower 5a of a first stage PSA apparatus to remove the highly adsorbable component therein and intermediate purified gas is supplied to the adsorbing tower 7b of a second stage PSA apparatus to adsorb medium adsorbable component while the low adsorbable component passed through said tower 7b is used in the washing of the adsorbing tower 5b through a washing pipe 30a to be exhausted from an exhaust gas discarding pipe 10'. At this time, the medium adsorbable component is desorbed from the adsorbing tower 7b under vacuum by a vacuum pump 8 to be recovered in a product tank 9. Subsequently, at the point of time when the adsorbing tower 7b was saturated, the supply of the stock gas is changed over to the adsorbing tower 7a and the adsorbing tower 7b is released from pressure and the product gas is flowed from the washing pipe 30a to perform washing and, succeedingly, vacuum desorption is performed.</p> |
