| 摘要 |
PURPOSE:To enable highly-identifying visual inspection, by uniformizing luminance distribution of a specimen surface using either one of means for converting light source light beams into parallel light beams, auxiliary light emitting means to lower luminance distribution area and deviating means of optical axis of ITV camera. CONSTITUTION:Beams of light emitted from the source 5 are converted to beams neary parallel by a light collecting lens 11 and later, they are irradiated onto a specimen surface passing through a half-mirror 3 for flattened luminance distribution 8. By this, a field signal 10 of high identifying property becomes available and visual inspection at high identification can be possible, even if the surface 1 happens to be a mirror surface, without spoiling advantage of the optical system. |
