| 摘要 |
PURPOSE:To make possible the production of a material having a stable mois ture sensing characteristic for a long period of time even without the provision of a heater thereto by executing a stage for kneading and calcining an org. silicon compd. polymer and graphite and a stage for applying at least one of alkali ion and halogen into to the calcined matter thereof and calcining again said matter. CONSTITUTION:Comb-shaped electrodes 2 are formed of Pt-Pd alloy paste by screen printing on an insulating base plate 1 consisting of alumina and are calcined after Pt lead wires 4 are attached thereto. Thinner is added to the compsn. consisting of, for example, about 61.4wt% org. silicon compd. polymer: methyl silicone, 27.6wt% graphite and 11wt% additive: SiO2 and after the mix ture is kneaded with an agitator, the mixture is coated thereon by a dipping treatment to about 50mum thickness and is calcined for avout 20hr at about 480 deg.C. Such base plate 1 is dipped for about one minute at about 25 deg.C in a water-alcohol solvent mixture contg. about 5% Na2CO3 and is again calcined for about one hour at about 450 deg.C to obtain a mositure sensitive film 3. The moisture sensitive sensor is produced by using such moisture sensitive material. |
