| 摘要 |
PURPOSE:To obtain a material which has high temp. detecting sensitivity, a low electric resistance value and a wide range of measurable humidity range by adding alkali ion to a heat-treated film of an org. silicon compd. polymer. CONSTITUTION:Comb-sahped electrodes 2 are formed of Pt-Pd alloy paste by screen printing on an insulating base plate 1 consisting of alumina and are calcined after Pt lead wires 4 are attached thereto. Methyl phenyl silicone is formed as a film of about 40mum thickness thereon by dipping and the coating film is heat-treated for about 1.5hr at about 290 deg.C; thereafter, the base plate 1 is dipped into an aq. soln. of about 5% Na2CO3 and is cleaned for about one hour by the ultrasonic wave applied thereto. The base plate is dried for about 30min at about 120 deg.C after the application of the alkali ion thereto and cleaning, by which the moisture sensor consisting of such material is manufactured. |
