| 摘要 |
PURPOSE:To obtain a material having a stable moisture sensing characteristic for a long period of time by applying at least one of alkali ion and halogen ion to at least one of SiO2 and zeolite then kneading the same with a binder and calcining the kneaded matter. CONSTITUTION:Comb-shaped electrodes 2 are formed of Pt-Pd alloy paste by acreen printing on an insulating base plate 1 consisting of alumina and are calcined after Pt lead wires 4 are attached thereto. The kneaded matter prepd. by dipping the powder obtd. by pulverizing a commercially marketed silica gel as SiO2 for about 15sec in an aq. sonl. of about 10% NaCl then kneading the same with aluminum phosphate at about 1:1 by weight is coated on the plate 1 to about 50mum thickness by a dipping treatment and is calcined for about 70min at a about 370 deg.C to obtain a moisture sensitive film 3. The moisture sensor is manufactured by using such moisture sensitive material. The material having the long-term moisture sensing characteristic is manufactured even with out the provision of the heater for preventing the deterioration with age. |
