| 摘要 |
The pressure detector which generates electric signals is provided with sensor elements (11) carried by a membrane (12) which is deformable as a function of the pressure and which closes a reference pressure chamber (18) with respect to the pressure medium. The reference pressure chamber (18) forms an oxygen-free space, preferably a vacuum space. Within said chamber, a conducting track (24) is arranged on a substrate; it is so strongly oxidized when a leak occurs in the reference chamber by introduction of oxygen that it is electrically cut off. To indicate such a leak in the reference pressure chamber (18), the conducting track (18) is connected to a measuring circuit. This solution may also be applied to semiconductor sensors, elongation measurement strips, capacitive pressure sensors, inductive pressure detectors, Hall detectors or other pressure detectors, as long as they are provided with a reference pressure chamber. |
