| 摘要 |
PURPOSE:To minimize dispersion of pattern's size and film's thickness to con trive to improve picture property by forming a dyeing layer constituting a color filter with stamped pattern. CONSTITUTION:After many photo diodes are formed on a semiconductor substrate 1, thereon a insulated film 3, a passivation film 4, a light shielding film 5 and a smoothing layer 6. Secondly, resist is applied on the substrate 1 and is exposed through prescribed mask and the opened stamped pattern is formed at a part dealing with the prescribed diode 2. Additionally, the substrate 1 is soaked in cyanine dyeing 7which has an aperture section A at a part dealing with the prescribed diode. After that, left pattern 21 of the resist on the layer of the aperture section A is formed. After an intermediate layer is formed, a yellow dyeing layer 9 is formed by the same process. Thereafter, an overcoat layer 10 is formed. By such a manner, the surface of the substrate 1 is flatted more, also the dispersion of pattern's size and the film's thickness can be reduced. |
