| 发明名称 |
OXYGEN THERAPY METHOD AND APPARATUS |
| 摘要 |
A solar cell fabrication procedure is described which is characterized by (1) formation of a "polysilazane" coating on a silicon substrate, (2) photo-lithography of the polysilazane coating to form a plating mask pattern, (3) a heating step which removes residual photoresist and converts the polysilazane coating to a denser form of silicon nitride having a reduced etch rate, and (4) use of densified silicon nitride as a mask for the plating of electrode metal and also as an anti-reflection coating. |
| 申请公布号 |
GB2142777(B) |
申请公布日期 |
1986.07.02 |
| 申请号 |
GB19840016965 |
申请日期 |
1984.01.06 |
| 申请人 |
* MOBIL SOLAR ENERGY CORPORATION |
发明人 |
ROBERT E * PHILLIPS;BRIAN L * TIEP;BEN A * OTSAP |
| 分类号 |
H01L21/28;H01L21/288;H01L21/318;H01L31/0216;H01L31/04;H01L31/18 |
主分类号 |
H01L21/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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