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发明名称
INRICHTING VOOR HET BEHANDELEN VAN HALFGELEIDERPLAKKEN OF DERGELIJKE.
摘要
申请公布号
NL8503386(A)
申请公布日期
1986.07.01
申请号
NL19850003386
申请日期
1985.12.09
申请人
ASM INC
发明人
分类号
H01L21/205;B05C13/02;H01L21/285;H01L21/31;H01L21/673;(IPC1-7):C30B31/14;H01L21/68
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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