| 摘要 |
PURPOSE:To prevent uneven density due to interference effect by using an electrophotographic sensitive body having 3 surface layers made of silicon contg. nitrogen as a constituent element. CONSTITUTION:The electrophotographic sensitive body is formed by depositing a photoconductive layer 21 made of amorphous Si as a base on a conductive substrate of cylindrical aluminum by plasma discharge decomposition of gases of SiH4, Si2H6, or the like mixed with a gas contg. an element of group IIIa of the periodic table for the purpose of enhancing the specific resistivity of the film, and laminating on this layer 21 the first, second, and third surface layers 22, 23, 24 in this order, and the first layer 22 is formed by the plasma discharge decomposition method using a gas mixture of SiH4, Si2H6, and an N-contg. gas, e.g., N2 or NH3, so as to control each value of an optical band gap within 1.60-2.00eV. |
