| 摘要 |
PURPOSE:To make it possible to measure accurate relative intensity and also accurate incident electron current by installing a dismountable standard sample base at the upper part of a cylinder. CONSTITUTION:A dismountable standard sample base 8 installed at the upper part of a cylinder 3 has standard samples allowing the measurement of accurate relative intensity and also a Faraday cup making it possible to measure accurate incident electron current. Thus, there is no need to prepare a standard sample every time, and since both a sample and standard samples can be placed at the same height, measurement of accurate relative intensity becomes possible. Also since the effect of electron beam contamination or dirtiness of the cylinder on incident electron current becomes nil, it is always possible to measure correct incident electron current. |
