| 摘要 |
PURPOSE:To improve the sensitivity of a device by reducing the moving distance of a driving coil group in a magnetic gap direction as short as possible at the driving of an objective lens. CONSTITUTION:A magnetic circuit consisting of a permanent magnet 16 N, S magnetized in the vertical direction and yorks 20, 21 constitutes a magnetic gap lx where magnetic flux 12, 13 of the Y axis direction exist and a driven part is suspended by a suspension 7 to be moved in three directions in the magnetic gap. Thereby, the driven part receives the electromagnetic force of the Z axis direction by current (based upon Fleming's left hand rule) flowing into a cylindrical coil 9, the electromagnetic force of an arrow 18 direction by a Z axis direction current flowing into saddle coils 101, 102 and the electromagnetic force of the Y axis direction. Namely, the objective lens 13 is moved in the longitudinal direction of a pin 6 and rotated around the axis B of the pin 6 and also around the axis C of a fixed terminal 15.
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