| 摘要 |
PURPOSE:To provide an optical recording medium which has high adhesiveness to a substrate, is less deteriorated in characteristic by temp. and humidity and is stable over a long period of time while in the region of high sensitivity of X<1 by depositing metallic tellurium by evaporation on the substrate in a gaseous oxygen atmosphere maintained under a specific partial pressure by an ion plating method. CONSTITUTION:The inside of a vacuum vessel 3 is first evacuated to 5X10<-6>-10<-5>Torr, then high-purity gaseous oxygen having <=-55 deg.C dew point is run from a high-pressure cylinder into the vessel 3. The pressure Po thereof is maintained under 1X10<-4>-9X10<-6>Torr. A voltage is impressed to a high-frequency excitation coil 4 in this state to generate a high-frequency electric field, by which the gaseous oxygen is excited and plasma is formed. The magnitude of the electric power to be impressed to the coil 4 affects largely the adhesiveness between the optical recording film and the substrate and further the stability of the optical recording medium. The high-frequency electric power is preferably used in a 50-500 watt (more preferably 100-400 watt) range.
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